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Structural and optical properties of Be-doped ZnO nanocrystalline films by pulsed laser deposition

机译：脉冲激光沉积Be掺杂ZnO纳米晶薄膜的结构和光学性质

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摘要

The heteroepitaxial Be_xZn_(1-x)O(x=0.4) (BZO) thin films were deposited on sapphire (c-Al_2O_3) substrates by pulsed laser deposition (PLD). BZO targets were synthesized using a traditional solid-reaction method. BZO films were deposited at a various substrate temperatures with a fixed P(O_2)=26 Pa, and the thickness of the films are estimated to be about 200 run. Based on the x-ray diffraction analysis, BZO thin films deposited at T_(sub.) = 550-700 ℃ exhibit c-axis preferred growth. BZO films deposited at 600 and 650 ℃ exhibit sharp absorption edges around 400 nm measured at room temperature. The optical energy gap obtained from the transmittance spectra is about 3.43-3.64 eV, which demonstrates a possibility of the band gap engineering with a BeO-ZnO alloy using a PLD method with a single BZO target. It has been found that the crystallinity as well as the band gap of BZO films is strongly influenced by the deposition temperature.
机译：通过脉冲激光沉积（PLD）将异质外延Be_xZn_（1-x）O（x = 0.4）（BZO）薄膜沉积在蓝宝石（c-Al_2O_3）衬底上。 BZO目标是使用传统的固相反应方法合成的。在固定的P（O_2）= 26 Pa的各种衬底温度下沉积BZO膜，并且膜的厚度估计约为200纳米。根据X射线衍射分析，在T_（sub。）= 550-700℃沉积的BZO薄膜表现出c轴优先生长。在室温和600 650℃下沉积的BZO薄膜在400 nm处显示出明显的吸收边缘。从透射光谱获得的光能隙大约为3.43-3.64 eV，这证明了使用带单个BZO靶的PLD方法的BeO-ZnO合金进行带隙工程设计的可能性。已经发现，BZO膜的结晶度以及带隙受到沉积温度的强烈影响。

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  • 来源
    《Thin Solid Films》 |2008年第12期|4190-4193|共4页
  • 作者

    Jim-Ki Chung; Won-Jeong Kim; Sang Su Kim; Tae Kwon Song; Cheol Jin Kim;

  • 作者单位

    Institute of Industrial Technology, Changwon National University, 9, Sarim-dong, Changwon city, Kyeongnam, 641-773, South Korea;

    Department of Physics, Changwon National University, Changwon, Kyeongnam, 641-773, South Korea;

    Department of Physics, Changwon National University, Changwon, Kyeongnam, 641-773, South Korea;

    Department of Ceramic engineering, Changwon National University, Changwon, Kyeongnam, 641-773, South Korea;

    i-Cube Center, Gyeongsang National University, Jinju, Kyeongnam, 660-701, South Korea;

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  • 正文语种 eng
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  • 关键词

    Be-doped ZnO (BZO); beryllium; zinc oxide; pulsed laser deposition; X-ray diffraction; optical properties;

    机译：掺杂的ZnO（BZO）;铍;氧化锌脉冲激光沉积X射线衍射;光学性质;

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