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首页> 外文期刊>The journal of physical chemistry, C. Nanomaterials and interfaces >Influences of Substrate and Annealing on the Structural and Optical Properties and Photoluminescence of Nanocrystalline ZnO Films Prepared by Plasma Assisted Pulsed Laser Deposition
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Influences of Substrate and Annealing on the Structural and Optical Properties and Photoluminescence of Nanocrystalline ZnO Films Prepared by Plasma Assisted Pulsed Laser Deposition

机译：衬底和退火对等离子体辅助脉冲激光沉积制备的纳米ZnO薄膜结构，光学性能和光致发光的影响

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Single-crystalline silicon, amorphous quartz, and single-crystalline sapphire were used as the substrates for the deposition of nanocrystalline zinc oxide (nc-ZnO) thin films by plasma assisted pulsed laser deposition from metallic zinc at low temperature below 80 °C, and a postdeposition annealing process was performed for the deposited nc-ZnO thin films. The influences of substrate and annealing on the structural and optical properties as well as the photoluminescence of the prepared nc-ZnO thin films were studied. Raman spectroscopy and Fourier-transform infrared spectroscopy measurements reveal the wurtzite ZnO phase in the films. X-ray diffraction results indicate the nanocrystalline structure of the films with c axis perpendicular to substrates. Optical characterization shows that the prepared films have an ultraviolet (UV) absorption edge near 380 nm with a direct band gap of about 3.25 eV. The prepared films emit predominantly UV photoluminescence at light excitation. The structure and properties of the films are dependent on substrates and the annealing process has different influences for the films deposited on different substrates.
机译：单晶硅，非晶石英和单晶蓝宝石被用作在80°C以下的低温下通过等离子体辅助脉冲激光从金属锌中沉积纳米晶氧化锌（nc-ZnO）薄膜的基底，并且对沉积的nc-ZnO薄膜进行沉积后退火工艺。研究了衬底和退火对制备的nc-ZnO薄膜的结构和光学性能以及光致发光的影响。拉曼光谱和傅立叶变换红外光谱测量显示出薄膜中的纤锌矿型ZnO相。 X射线衍射结果表明c轴垂直于基材的薄膜的纳米晶体结构。光学表征表明，所制备的膜在380nm附近具有紫外（UV）吸收边缘，其直接带隙为约3.25eV。所制备的膜在光激发下主要发射UV光致发光。膜的结构和性质取决于基底，并且退火工艺对沉积在不同基底上的膜具有不同的影响。

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