Structural And Optical Properties Of A-plane Zno Thin Films Synthesized Onγ-lial__2 (302) Substrates By Low Pressure Metal-organic chemical Vapor Deposition

Hui Lin; Shengming Zhou; Jianhua Zhou; Xuedong Liu; Shulin Gu; Shunming Zhu; Zili Xie; Ping Han; Rong Zhang

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Structural And Optical Properties Of A-plane Zno Thin Films Synthesized Onγ-lial__2 (302) Substrates By Low Pressure Metal-organic chemical Vapor Deposition

机译：低压金属有机化学气相沉积法在γ-lial__2（302）衬底上合成的A平面Zno薄膜的结构和光学性质

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Nonpolar a-plane (1120) ZnO thin films have been fabricated on γ-UAlO_2 (302) substrates via the low-pressure metal-organic chemical vapor deposition. An obvious intensity variation of the E_2 mode in the Raman spectra indicates that there exhibits in-plane optical anisotropy in the a-plane ZnO thin films. Highly-oriented uniform grains of rectangular shape can be seen from the atomic force microscopy images, which mean that the lateral growth rate of the thin films is also anisotropic. It is demonstrated experimentally that a buffer layer deposited at a low temperature (200 ℃) can improve the structural and optical properties of the epilayer to a large extent.

机译：通过低压金属有机化学气相沉积法在γ-UAlO_2（302）衬底上制备了非极性a平面（1120）ZnO薄膜。拉曼光谱中E_2模式的明显强度变化表明，在a面ZnO薄膜中表现出面内光学各向异性。从原子力显微镜图像可以看到矩形的高度取向的均匀晶粒，这意味着薄膜的横向生长速率也是各向异性的。实验证明，在低温（200℃）下沉积缓冲层可以在很大程度上改善外延层的结构和光学性能。

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来源
《Thin Solid Films》 |2008年第18期|p.6079-6082|共4页
作者
Hui Lin; Shengming Zhou; Jianhua Zhou; Xuedong Liu; Shulin Gu; Shunming Zhu; Zili Xie; Ping Han; Rong Zhang;
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作者单位

Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China;

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正文语种 eng
中图分类工程材料学;
关键词
a-plane zno thin films; structural and optical properties; γ-ualo_2 (302) substrates; metal organic chemical vapor deposition; x-ray diffraction; atomic force miscroscopy; raman spectroscopy;

机译：a平面zno薄膜;结构和光学性质;γ-ualo_2（302）衬底;金属有机化学气相沉积;x射线衍射;原子力显微镜观察;拉曼光谱;

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机译：金属有机化学气相沉积法在LaAlO_3（100）衬底上生长a平面ZnO薄膜
2. Effect of the substrate on the properties of ZnO-MgO thin films grown by atmospheric pressure metal-organic chemical vapor deposition [J] . A.M. Torres-Huerta, MA Dominguez-Crespo, S.B. Brachetti-Sibaja, Thin Solid Films . 2011,第18期

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3. Optical and structural properties of ZnO thin films grown on various substrates by metalorganic chemical vapor deposition [J] . Kong BH, Mohanta SK, Kim DC, Physica, B. Condensed Matter . 2007,第0期

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Structural And Optical Properties Of A-plane Zno Thin Films Synthesized Onγ-lial__2 (302) Substrates By Low Pressure Metal-organic chemical Vapor Deposition

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