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Structural, optical and mechanical properties of coloured TiN_xO_y thin films

机译：TiN_xO_y彩色薄膜的结构，光学和机械性能

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摘要

Within the frame of this work, coloured films based on single layered titanium oxynitride (TiN_xO_y) compounds were prepared. The films were deposited by r.f. magnetron sputtering under variation of process parameters such as bias voltage and flow rate of reactive gases. Colour varied from shiny golden type for low oxygen contents (characteristic of TiN films) to dark blue for higher oxygen contents. The information on the composition was obtained by Rutherford backscattering spectrometry. X-ray diffraction results revealed the development of a face-centred cubic phase with <111> orientation (TiN type; lattice parameter of ～0.429 nm) and traces of dispersed oxide phases. Nanoindentation experiments showed values of hardness between 20 and 40 GPa, strongly dependent on the composition and microstructure. Compressive stresses between -0.5 and -6 GPa were determined by the deflection method.
机译：在这项工作的框架内，制备了基于单层氮氧化钛（TiN_xO_y）化合物的彩色薄膜。薄膜由r.f.在诸如偏置电压和反应气体流速等工艺参数变化的情况下进行磁控溅射。颜色从低氧含量（TiN薄膜的特性）的发亮金色类型到高氧含量的深蓝色。关于组成的信息是通过卢瑟福反向散射光谱法获得的。 X射线衍射结果表明，具有<111>取向的面心立方相（TiN型；晶格参数为〜0.429 nm）的发展和痕量氧化物相的痕迹。纳米压痕实验显示硬度值在20至40 GPa之间，强烈依赖于组成和微观结构。通过挠曲法确定了-0.5至-6 GPa之间的压应力。

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