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Chemical vapor deposition growth of graphene on copper substrates: current trends

机译:铜基板上石墨烯的化学气相沉积生长:当前趋势

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摘要

The most interesting recent developments and trends in graphene growth technologies on copper substrates are reviewed. An analysis is given of how the substrate preparation quality and other process parameters affect the properties of films obtained at different pressures and temperatures on a copper foil and lower-thickness copper films. The fabrication methods and properties of large single-crystal graphene domains are discussed together with technologies that do not require graphene film transfer onto a dielectric substrate. Another important possible approach, that of graphene growing laterally from specially formed few-layer graphene and carboncontaining seeds or metal catalysts, is also discussed.
机译:本文综述了铜基板上石墨烯生长技术中最有趣的最新发展和趋势。分析了基材制备质量和其他工艺参数如何影响在不同压力和温度下在铜箔和较低厚度的铜膜上获得的膜的性能。讨论了大单晶石墨烯畴的制造方法和性能以及不需要将石墨烯薄膜转移到介电衬底上的技术。还讨论了另一种重要的可能方法,即从特殊形成的几层石墨烯和含碳晶种或金属催化剂横向生长石墨烯的方法。

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