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Microcavity plasma devices and arrays: a new realm of plasma physics and photonic applications

机译：微腔等离子体设备和阵列：等离子体物理和光子应用的新领域

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摘要

The confinement of low temperature, non-equilibrium plasmas to cavities having characteristic spatial dimensions < 1 mm is providing new avenues of inquiry for plasma science. Not only is a previously unexplored region of parameter space now accessible, but the interaction of the plasma with its material boundaries raises fascinating questions and opportunities. Other scientific issues that come to the fore include scaling relationships and the collisional processes that become prevalent in a high pressure environment. The general characteristics of microplasmas, as well as several emerging applications, are briefly described here. With regard to the latter, emphasis will be placed on photonics and, specifically, the demonstration of large (500 x 500) arrays of microcavity plasma devices in Si, the observation of photodetection in the visible, near-infrared and ultraviolet by a microplasma, and the measurement of optical gain in the blue (lambda similar to 460 nm) from a linear array of microplasmas in a ceramic structure.
机译：将低温，非平衡等离子体限制在特征空间尺寸<1 mm的腔体内，为等离子体科学提供了新的研究途径。现在不仅可以访问以前未曾探索过的参数空间区域，而且等离子体与其材料边界的相互作用也引发了令人着迷的问题和机遇。其他引起关注的科学问题包括比例关系和在高压环境中变得普遍的碰撞过程。此处简要介绍了微浆胞浆的一般特征以及几种新兴应用。关于后者，重点将放在光子学上，特别是在Si中演示大型（500 x 500）微腔等离子体设备阵列，微等离子体在可见光，近红外光和紫外光中的光检测观察，并测量陶瓷结构中线性线性微等离子体阵列中的蓝色光（λ类似于460 nm）的光学增益。

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