Contactless Method for Studying the Parameters of the Electrode Region of an RF Discharge

A. F. Aleksandrov; V. A. Ryaby; V. P. Savionv; V. G. Yakunin

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Contactless Method for Studying the Parameters of the Electrode Region of an RF Discharge

机译：研究射频放电电极区域参数的非接触方法

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A nonintrusive contactless method for studying the parameters of the electrode region of a capacitive low-pressure RF discharge is proposed. The method involves the measurements of dc and ac electric voltages at the elements of the discharge circuit with subsequent calculations of both the electrostatic potential drop across the electrode sheath and the sheath thickness by using relations derived in the paper. For a collisionless electrode sheath, the density of the positive-ion current onto the electrode and the charge density at the plasma boundary are determined. It is shown experimentally that the method can be successfully applied to studying capacitive Rf discharges with inner or outer electrodes.

机译：提出了一种用于研究电容式低压射频放电电极区域参数的非侵入式非接触方法。该方法涉及测量放电电路元件上的直流和交流电压，并通过使用本文中得出的关系对电极护套两端的静电势降和护套厚度进行后续计算。对于无碰撞的电极护套，确定在电极上的正离子电流的密度以及在等离子体边界处的电荷密度。实验表明，该方法可以成功地用于研究具有内部或外部电极的电容性Rf放电。

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《Plasma physics reports》 |2002年第12期|共7页
作者
A. F. Aleksandrov; V. A. Ryaby; V. P. Savionv; V. G. Yakunin;
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Contactless Method for Studying the Parameters of the Electrode Region of an RF Discharge

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