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Chemical mechanisms inducing a dc current measured in the flowing post-discharge of an RF He-O _2 plasma torch

机译:化学机理感应在RF He-O _2等离子炬的流动后放电中测得的直流电流

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摘要

The post-discharge of an RF plasma torch supplied with helium and oxygen gases is characterized by mass spectrometry, optical emission spectroscopy and electrical measurements. We have proved the existence of a dc current in the post-discharge (1-20A), attributed to the Penning ionization of atmospheric nitrogen and oxygenated species. The mechanisms ruling this dc current are investigated through experiments in which we discuss the influence of the O _2 flow rate, the He flow rate and the distance separating the plasma torch from a material surface located downstream.
机译:配有氦气和氧气的RF等离子炬的后放电特征在于质谱,光发射光谱和电学测量。我们已经证明在放电后(1-20A)中存在直流电流,这归因于大气氮和氧化物种的Penning电离。通过实验研究了控制该直流电流的机制,在实验中我们讨论了O _2流量,He流量以及等离子炬与位于下游的材料表面之间的距离的影响。

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