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The development of a 200 kV monochromated field emission electron source

机译：200 kV单色场发射电子源的研制

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We report the development of a monochromator for an intermediate-voltage aberration-corrected electron microscope suitable for operation in both STEM and TEM imaging modes. The monochromator consists of two Wien filters with a variable energy selecting slit located between them and is located prior to the accelerator. The second filter cancels the energy dispersion produced by the first filter and after energy selection forms a round monochromated, achromatic probe at the specimen plane. The ultimate achievable energy resolution has been measured as 36 meV at 200 kV and 26 meV at 80 kV. High-resolution Annular Dark Field STEM images recorded using a monochromated probe resolve Si-Si spacings of 135.8 pm using energy spreads of 218 meV at 200 kV and 217 meV at 80 kV respectively. In TEM mode an improvement in non-linear spatial resolution to 64 pm due to the reduction in the effects of partial temporal coherence has been demonstrated using broad beam illumination with an energy spread of 134 meV at 200 kV.
机译：我们报告了适用于STEM和TEM成像模式的中压像差校正电子显微镜的单色仪的开发。单色仪由两个维恩滤光片组成，两个维恩滤光片之间有可变能量选择狭缝，位于加速器之前。第二个滤光片消除了第一个滤光片产生的能量色散，能量选择后在样品平面上形成了一个圆形的单色消色差探针。最终可实现的能量分辨率已测量为200 kV下为36 meV，80 kV下为26 meV。使用单色探头记录的高分辨率环形暗场STEM图像分别使用200 kV时218 meV和80 kV时217 meV的能量扩散分辨135.8 pm的Si-Si间距。在TEM模式下，已证明使用部分光束在200 kV下的能量散布为134 meV的宽光束照明，可以将非线性空间分辨率提高到64 pm，这是由于部分时间相干效应的降低所致。

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