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首页> 外文期刊>Ultramicroscopy >Design of an aberration corrected low-voltage SEM
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Design of an aberration corrected low-voltage SEM

机译：像差校正低压扫描电镜的设计

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摘要

The low-voltage foil corrector is a novel type of foil aberration corrector that can correct for both the spherical and chromatic aberration simultaneously. In order to give a realistic example of the capabilities of this corrector, a design for a low-voltage scanning electron microscope with the lowvoltage foil corrector is presented. A fully electrostatic column has been designed and characterised by using aberration integrals and ray tracing calculations. The amount of aberration correction can be adjusted relatively easy. The third order spherical and the first order chromatic aberration can be completely cancelled. In the zero current limit, a FW50 probe size of 1.0nm at 1 kV can be obtained. This probe size is mainly limited by diffraction and by the fifth order spherical aberration.
机译：低压箔校正器是一种新型的箔像差校正器，可以同时校正球差和色差。为了给出该校正器功能的实际例子，提出了一种带有低压箔校正器的低压扫描电子显微镜的设计。通过使用像差积分和光线跟踪计算来设计和表征全静电柱。像差校正量可以相对容易地调节。可以完全消除三阶球差和一阶色差。在零电流限制下，在1 kV下可获得1.0nm的FW50探针尺寸。该探头的尺寸主要受衍射和五阶球差的限制。

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