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Electrochemical deposition onto self-assembled monolayers: New insights into micro- and nanofabrication

机译:电化学沉积到自组装单层上:微米和纳米加工的新见解

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摘要

Pattern transfer with high resolution is a frontier topic in the emerging field of nanotechnologies. Electrochemical molding is a possible route for nanopatterning metal, alloys and oxide surfaces with high resolution in a simple and inexpensive way. This method involves electrodeposition onto a conducting master covered by a self-assembled alkanethiolate monolayer (SAMs). This molecular film enables direct surface-relief pattern transfer from the conducting master to the inner face of the electrodeposit, and also allows an easy release of the electrodeposited film due their excellent anti-adherent properties. Replicas of the original conductive master can be also obtained by a simple two-step procedure. SAM quality and stability under electrodeposition conditions combined with the formation of smooth electrodeposits are crucial to obtain high-quality pattern transfer with sub-50 nm resolution.
机译:高分辨率的图案转移是纳米技术新兴领域的前沿课题。电化学模制是一种以简单且廉价的方式对金属,合金和氧化物表面进行纳米构图的高分辨率方法。该方法涉及将电沉积到由自组装链烷硫醇单层(SAMs)覆盖的导电母板上。该分子膜能够将表面浮雕图案从导电母版直接转移到电沉积物的内表面,并且由于其优异的抗粘附性能,还可以使电沉积膜容易剥离。原始导电母盘的副本也可以通过简单的两步过程获得。在电沉积条件下,SAM的质量和稳定性以及光滑电沉积的形成对于获得低于50 nm分辨率的高质量图案转印至关重要。

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