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Electrochemical Deposition onto Self-Assembled Monolayers: New Insights into Micro- and Nanofabrication

机译:自组装单层上的电化学沉积:微型和纳米制造的新见解。

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摘要

Pattern transfer with high resolution is a frontier topic in the emerging field of nanotechnologies.Electrochemical molding is a possible route for nano-patterning metal,alloys and oxide surfaces with high resolution in a simple and inexpensive way.This method involves electrodeposition onto a conducting master covered by a self-assembled alkanethiolate mono-layer (SAMs).This molecular film enables direct surface-relief pattern transfer from the conducting master to the inner face of the electrodeposit,and also allows an easy release of the electrodeposited film due their excellent anti-adherent properties.Replicas of the original conductive master can be also obtained by a simple two-step procedure.SAM quality and stability under electrodeposition conditions combined with the formation of smooth electrodeposits are crucial to obtain high-quality pattern transfer with sub-50 nm resolution.
机译:高分辨率的图案转移是纳米技术新兴领域中的一个前沿课题。电化学模塑是一种以简单且廉价的方式对金属,合金和氧化物表面进行纳米图案化的可能途径,该方法涉及将电沉积到导电母板上这种分子膜可实现从导电母盘到电沉积内表面的直接表面浮雕图案转移,并且由于其优异的抗静电性,可轻松释放电沉积膜,并被自组装的链烷硫醇单分子膜(SAMs)覆盖。附着特性:也可以通过简单的两步程序获得原始导电母版的复制品。电沉积条件下的SAM质量和稳定性以及光滑电沉积的形成对于获得低于50 nm的高质量图案转印至关重要解析度。

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