Nanostructuring of single crystal diamond by reactive and non-reactive accelerated cluster erosion

C. Becker; J. Gspann; R. Kramer

首页> 外文期刊>The European physical journal, D. Atomic, molecular, and optical physics >Nanostructuring of single crystal diamond by reactive and non-reactive accelerated cluster erosion

【24h】

Nanostructuring of single crystal diamond by reactive and non-reactive accelerated cluster erosion

机译：反应性和非反应性团簇腐蚀对单晶金刚石的纳米结构

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

Reactive accelerated cluster erosion (RACE) of single crystal artificial diamond has been used to fabricate various nano- and microstructures. Carbondioxide clusters of about 1000 molecules are accelerated to 100 keV to act as the eroding agent. Using movable shadow masks, the accelerated cluster beam may erode staircase structures acting as an optical grating. A cycloid gear has been generated via a stationary nickel mask. Non-reactive accelerated cluster erosion using argon clusters will be considered for comparison.

机译：单晶人造金刚石的反应性加速团簇腐蚀（RACE）已用于制造各种纳米和微观结构。大约1000个分子的二氧化碳簇被加速至100 keV，以充当腐蚀剂。使用可移动的荫罩，加速的簇光束可能侵蚀用作光栅的阶梯结构。摆线齿轮是通过固定的镍面罩生成的。将比较使用氩气团簇的非反应性加速团簇腐蚀。

著录项

来源
《The European physical journal, D. Atomic, molecular, and optical physics》 |2001年第3期|共4页
作者
C. Becker; J. Gspann; R. Kramer;
展开▼
作者单位

展开▼
收录信息
原文格式 PDF
正文语种 eng
中图分类分子物理学、原子物理学;
关键词
atomic and molecular clusters;

机译：原子和分子簇;

相似文献

外文文献
中文文献
专利

1. Nanostructuring of single crystal diamond by reactive and non-reactive accelerated cluster erosion [J] . C. Becker, J. Gspann, R. Kramer The European physical journal, D. Atomic, molecular, and optical physics . 2001,第1a3期

机译：反应性和非反应性团簇腐蚀对单晶金刚石的纳米结构
2. Nanofriction studies of reactively or non-reactively cluster-eroded single crystal diamond [J] . Kramer R, Yamaguchi Y, Gspann J The European physical journal, D. Atomic, molecular, and optical physics . 2005,第1a3期

机译：反应性或非反应性团簇腐蚀的单晶金刚石的纳米摩擦研究
3. Investigation of the spectral characteristics of silicon-vacancy centers in ultrananocrystalline diamond nanostructures and single crystalline diamond [J] . Kunuku Srinivasu, Chen Yen-Chun, Chen Chien-Hsu, Journal of Applied Physics . 2020,第3期

机译：超纳米晶金刚石纳米结构和单晶金刚石中硅空位中心的光谱特性研究
4. Reactive accelerated cluster erosion (RACE) by ionized cluster beams [C] . Juergen Gspann Symposium J on Correlated Effects in Atomic and Cluster Ion Bombardment and Implantation, Symposium C on Pushing the Limits of Ion Beam Processing-From Engineering to Atomic Scale Issues, And Symposium H on Advanced Deposition Processes and Character . 1995

机译：电离簇束的反应性加速簇腐蚀（RACE）
5. Investigation of Single Crystal Diamond for Swift Heavy Ion Beam Detectors and Study of Diamond Growth for Improvement of Diamond Material for Detectors [D] . Bhattacharya, Ayan 2018

机译：快速重离子束探测器的单晶金刚石研究及改进金刚石材料的金刚石生长研究
6. Reliable Nanofabrication of Single-Crystal Diamond Photonic Nanostructures for Nanoscale Sensing [O] . Mariusz Radtke, Richard Nelz, Abdallah Slablab, 2019

机译：单晶金刚石光子纳米结构的可靠纳米加工用于纳米级传感。
7. Single-crystal and polycrystalline diamond erosion studies in Pilot-PSI [O] . D. Kogut, D. Aussems, N. Ning, 2018

机译：Pilot-PSI中的单晶和多晶钻石侵蚀研究

Nanostructuring of single crystal diamond by reactive and non-reactive accelerated cluster erosion

摘要

著录项

相似文献

相关主题

期刊订阅