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首页> 外文期刊>The European physical journal. Applied physics >Real-time high-resolution topographic imagery using interference microscopy
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Real-time high-resolution topographic imagery using interference microscopy

机译:使用干涉显微镜的实时高分辨率地形图

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New instrumentation has been developed that is dedicated to the measurement of surface morphology with high resolutions and short acquisition times. Sinusoidal phase-shifting interferometry is demonstrated to provide within an acquisition time of only a few milliseconds topographic images with ~1nm height precision, ~1 μm lateral resolution, and a few tens of pm sensitivity. A white-light scanning microscope is also under development, using an in-house developed high speed, intelligent CCD camera, the first tests of which demonstrate the feasibility of providing topographic images of deep surface relief (several microns to several tens of microns) within less than 0.3s. The useful lateral field of view can be extended by employing image "stitching" white maintaining a high lateral resolution.
机译:已经开发出了专门用于高分辨率和短采集时间的表面形态测量的新仪器。正弦相移干涉术被证明可以在几毫秒的采集时间内提供具有〜1nm高度精度,〜1μm横向分辨率和几十pm灵敏度的地形图像。白光扫描显微镜也正在开发中,它使用内部开发的高速智能CCD相机,其首次测试证明了在内部提供深层表面起伏(几微米到几十微米)的地形图像的可行性。小于0.3s。可以通过采用保持高横向分辨率的图像“缝制”白色来扩展有用的横向视场。

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