Simple Approach to Superamphiphobic Overhanging Silicon Nanostructures

Ramasamy Thangavelu Rajendra Kumar; Klaus Bo Mogensen; Peter Boggild

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Simple Approach to Superamphiphobic Overhanging Silicon Nanostructures

机译：超疏水性悬垂硅纳米结构的简单方法

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Superhydrophobic silicon nanostructures were fabricated by anisotropic etching of silicon coated with a thin hydrophobic layer. At certain etch parameters, overhanging nanostructures form at the apexes of the rod-shaped tips. This leads to superoleophobic behavior for several oily liquids with contact angles up to 152° and roll-off angle down to 8°. Such nonlithographic nanoscale overhanging structures can also be added to silicon nanograss by deposition of a thin SiO2 layer, which equips the silicon rods with 100-300 nm sized overhanging structures. This is a simple, fast, nonlithographic method for introducing amphiphobic behavior on a surface consisting of vertically aligned micro- or nanostructures.

机译：超疏水硅纳米结构是通过各向异性蚀刻涂有薄疏水层的硅制成的。在某些蚀刻参数下，在杆状尖端的顶端形成悬垂的纳米结构。这导致了几种油性液体的超疏油行为，接触角高达152°，滚降角高达8°。还可以通过沉积薄的SiO2层将此类非光刻纳米级突出结构添加到硅纳米草中，该薄SiO2层为硅棒配备了100-300 nm大小的突出结构。这是一种简单，快速的非光刻方法，用于在由垂直排列的微结构或纳米结构组成的表面上引入两性行为。

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《The journal of physical chemistry, C. Nanomaterials and interfaces》 |2010年第7期|共5页
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Ramasamy Thangavelu Rajendra Kumar; Klaus Bo Mogensen; Peter Boggild;
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中图分类物理化学（理论化学）、化学物理学;
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Simple Approach to Superamphiphobic Overhanging Silicon Nanostructures

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