We prepare TeO_x thin films by vacuum evaporation of TeO_2 powder. It is found that the as-deposited TeO_x films can represent a two-component system comprising crystalline tellurium particles dispersed in an amorphous TeO_2 matrix. Results of the static recording test show that the TeO_x films have good writing sensitivity for short-wavelength laser beam (514.5 nm). Primary results of the dynamic recording test at 514.5 nm are also reported. The carrier-to-noise ratio of 30 dB is obtained for the disc using a TeO_x film as the recording medium. Atomic fore microscopy is used to study the microstructure of recorded marks. Micro-area morphology images show that the marks are mechanically deformed, and depressions and bugles have been imaged in the recorded marks, resulting in the scattering of the reading laser beam. The analytical results of transmission electron microscopy show that there is not obvious difference between the phase states of the tellurium particles before and after laser irradiation. Recording mechanisms of the TeO_x thin films are discussed based on the experimental results.
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