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首页> 外文期刊>Chinese science bulletin >Fatigue characteristics of ferroelectric (Pb_(0.925)La_(0.075))- (Zr_(0.65)Ti_(0.35))_(0.981)O_3 thin films
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Fatigue characteristics of ferroelectric (Pb_(0.925)La_(0.075))- (Zr_(0.65)Ti_(0.35))_(0.981)O_3 thin films

机译:铁电体(Pb_(0.925)La_(0.075))-(Zr_(0.65)Ti_(0.35))_(0.981)O_3薄膜的疲劳特性

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摘要

Due to the applications in electronics and optics in the past two decades, ferroelectric thin films (BaTiO_3, PbTiO_3, (Pb_(1-x)La_x)(Zr_yTi_(1-y))O_3(PLZT x/y/1-y), LiNbO_3, Bi_4Ti_3O+(12), etc.) have been widely investigated. Especially, ferroelectric thin film memory, combining the advantage of semiconductor memory with that of magnetic memory, has properties including high speed, high density, nonvolatility and good radiation hardness, and can be compatible with semiconductor technology. It thushas drawn considerable attention, These applications all need high-quality ferroelectric thin films, Many thin-film preparation techniques, such as laser ablation, sputtering, epitaxial deposition, chemical vapor deposition and sol-gel, have been used to prepare ferroelectric thin films on various substrates.
机译:由于过去二十年来在电子和光学领域的应用,铁电薄膜(BaTiO_3,PbTiO_3,(Pb_(1-x)La_x)(Zr_yTi_(1-y))O_3(PLZT x / y / 1-y) ,LiNbO_3,Bi_4Ti_3O +(12)等)已被广泛研究。特别地,铁电薄膜存储器结合了半导体存储器和磁存储器的优点,具有包括高速,高密度,非易失性和良好的辐射硬度的特性,并且可以与半导体技术兼容。因此,它引起了相当大的关注。这些应用都需要高质量的铁电薄膜。许多薄膜制备技术,例如激光烧蚀,溅射,外延沉积,化学气相沉积和溶胶-凝胶,已被用于制备铁电薄膜。在各种基材上。

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