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首页> 外文期刊>Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology >Gas-phase characterization in diamond hot-filament CVD by infrared tunable diode laser absorption spectroscopy
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Gas-phase characterization in diamond hot-filament CVD by infrared tunable diode laser absorption spectroscopy

机译：红外可调二极管激光吸收光谱法表征金刚石热丝CVD中的气相

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摘要

In hot-filament CVD the gas-phase composition is a vital parameter for diamond coating results. Concentrations of carbon-containing species have significant influence on growth rate, quality and morphology of deposited diamond. To learn more about the correlations between process parameters and gas species concentrations we applied the highly sensitive infrared tunable diode laser absorption spectroscopy (IR-TDLAS) technique. With a sophisticated compact IR-TDLAS unit, relative and absolute concentrations of CH4, C2H2 and CO were simultaneously measured. Also, the absolute concentration of the methyl radical was determined in dependence on process parameters. Concentrations Of CO2, C2H6 and HCN were investigated but found to be lower than the detection limit. The influence of the typical diamond CVD-process parameters on various species concentrations is discussed. The applicability of IR-TDLAS for hot-filament process monitoring is evaluated. In context with diamond growth results, information for CVD process refinement was deducted from the IR-TDLAS measurements. (c) 2006 Elsevier Ltd. All rights reserved.
机译：在热丝CVD中，气相组成是金刚石涂层结果的重要参数。含碳物质的浓度对沉积钻石的生长速度，质量和形态具有重大影响。为了了解有关工艺参数和气体种类浓度之间关系的更多信息，我们应用了高灵敏的红外可调二极管激光吸收光谱（IR-TDLAS）技术。使用精密的紧凑型IR-TDLAS装置，可以同时测量CH4，C2H2和CO的相对和绝对浓度。同样，根据工艺参数确定甲基的绝对浓度。研究了CO2，C2H6和HCN的浓度，但发现浓度低于检测极限。讨论了典型金刚石CVD工艺参数对各种物种浓度的影响。评估了IR-TDLAS在热丝过程监控中的适用性。在钻石生长结果的背景下，从IR-TDLAS测量中扣除了用于CVD工艺改进的信息。 （c）2006 Elsevier Ltd.保留所有权利。

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