Mitsubishi Rayon will start full-scale manufacture in 2007 of its acrylic polymer photoresist material for use with argon fluoride,or ArF,excimer lasers.The product,which features high levels of resolution and durability,is receiving favorable responses from customers.The company plans to construct a production unit at its Yokohama technology research laboratory for operational startup in the summer of 2007.It currently is meeting requests for the material with the limited amount supplied by its pilot plant and production commissioned to another company.
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