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首页> 外文期刊>Journal de Physique, IV: Proceedings of International Conference >Improved spin dynamics in soft magnetic films from 2D arrays of stripes and dots patterned by laser ablation
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Improved spin dynamics in soft magnetic films from 2D arrays of stripes and dots patterned by laser ablation

机译：通过激光烧蚀图案化的二维条带和点阵列，改善了软磁膜的自旋动力学

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摘要

Alternative to photolithography process for fabrication of 2D arrays of magnetic dots is proposed from a very simple, fast and low cost technique, of laser ablation. Magnetic films with different compositions, structures (NiFe, CoZr, FeN monolayers and [Co/Cu]_n multilayers) and thickness (from 100 to 300 nm) have been submitted at the focalisation point of an ionized argon laser (3W CW maximum power) to a lateral movement produced by a motorized X-Y translation stage. Tracks of partial or total ablation down to the substrate can be realized with well defined width from 3 to 100 microns, depending on the laser beam defocusing and power and on the sample velocity. The possibility of different patterns corresponding to stripes, bars and square 2D arrays with different shape factor is described with size decreasing from millimeter to micron scale. It is shown that laser sputtering can induce strong changes in both static and dynamical magnetic properties of the films as discussed from the magnetization processes of domain wall at low frequency and the complex permeability in the microwave range.
机译：通过非常简单，快速且低成本的激光烧蚀技术，提出了用于制造磁点2D阵列的光刻工艺的替代方法。具有不同成分，结构（NiFe，CoZr，FeN单层和[Co / Cu] _n多层）和厚度（从100至300 nm）的磁性膜已在离子化氩激光器的聚焦点（3W CW最大功率）提交由电动XY平移台产生的横向运动。可以实现精确到3至100微米的宽度，直至部分或全部烧蚀到基板的轨迹，具体取决于激光束的散焦和功率以及样品的速度。描述了与具有不同形状因数的条纹，条形和正方形2D阵列相对应的不同图案的可能性，其尺寸从毫米级减小到微米级。结果表明，正如畴壁在低频下的磁化过程和微波范围的复磁导率所讨论的那样，激光溅射可以引起薄膜的静态和动态磁性能的强烈变化。

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