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首页> 外文期刊>Journal of atomic and molecular physics >Optical Emission Spectroscopic Analysis of Plasma Plume during Pulsed Laser Deposition of PZT
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Optical Emission Spectroscopic Analysis of Plasma Plume during Pulsed Laser Deposition of PZT

机译：PZT脉冲激光沉积过程中等离子体羽流的发射光谱分析

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Spatial variation in intensity of spectral emission, electron temperature, number density, and the time of flight (TOF) of ions and neutrals at various oxygen ambiances has been investigated on ferroelectric lead zirconium titanate (PZT) plasma using optical emission spectroscopy. Plasma produced by ablating PZT ceramic target using Nd-YAG laser operating at the third harmonics (λ = 355 nm, τ = 10 ns, repetition frequency 10 Hz) was investigated at various oxygen partial pressures and at various distances from the target surface. Here energy density for laser fluence was fixed as 3.13 Jcm~(-2) and distance from the target and ambient gas pressure were varied. The electron number density N_e and electron temperature of the PZT plasma at the early stage of plume expansion were measured as 1.7 × 10~(17) Jcm~(-2) and 13200 K, respectively, and thus verified the existence of local thermodynamic equilibrium (LTE). Time of flight spectra (TOF) of neutral and singly ionized species in plasma were recorded. The result shows that plasma parameters and velocity of species are of same order for various oxygen partial pressures but have a decreasing tendency with distance. The energy of almost all species in the plume become more or less same at 0.1 mbar. These conditions favour the growth of perovskite PZT thin films.
机译：在铁氧钛酸锆锆（PZT）等离子体上，使用光发射光谱法研究了光谱发射强度，电子温度，数量密度以及离子和中性离子在各种氧环境下的飞行时间（TOF）的空间变化。在各种氧气分压和距靶材表面不同距离的情况下，研究了使用Nd-YAG激光烧蚀PZT陶瓷靶材产生的等离子体，该Nd-YAG激光工作于三次谐波（λ= 355 nm，τ= 10 ns，重复频率10 Hz）。在此，激光能量密度的能量密度固定为3.13 Jcm〜（-2），并且距目标的距离和环境气压有所变化。羽流膨胀初期PZT等离子体的电子数密度N_e和电子温度分别为1.7×10〜（17）Jcm〜（-2）和13200 K，从而证明存在局部热力学平衡（LTE）。记录血浆中中性和单电离物质的飞行时间谱（TOF）。结果表明，等离子体参数和物质的速度对于不同的氧分压具有相同的数量级，但是随着距离的增加而减小。羽流中几乎所有物种的能量在0.1 mbar时或多或少变得相同。这些条件有利于钙钛矿PZT薄膜的生长。

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