Secondary Ion Mass Spectrometry and Time-of-Flight Secondary Ion Mass Spectrometry Study of Impurity Measurements in HgCdTe

STEVE PRICE; LARRY WANG; ALICE WANG

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Secondary Ion Mass Spectrometry and Time-of-Flight Secondary Ion Mass Spectrometry Study of Impurity Measurements in HgCdTe

机译：HgCdTe中杂质测量的二次离子质谱和飞行时间二次离子质谱研究

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In this study,time-of-flight(TOF)secondary ion mass spectrometry(SIMS)was compared against dynamic SIMS to determine detection limits and background levels for nine impurities:Li,Na,K,Al,Ni,As,In,Fe,and Cu.Statistics were gathered by measuring six material test structure samples from six different liquid phase epitaxy(LPE)HgCdTe double layer hetero-junction(DLHJ)wafers.Also included is a comparison between dynamic SIMS and TOF-SIMS capabilities.

机译：在这项研究中，将飞行时间（TOF）二次离子质谱（SIMS）与动态SIMS进行了比较，以确定9种杂质：Li，Na，K，Al，Ni，As，In，Fe的检测限和背景水平通过测量来自六个不同液相外延（LPE）HgCdTe双层异质结（DLHJ）晶片的六个材料测试结构样本来收集统计数据。还包括动态SIMS和TOF-SIMS功能之间的比较。

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来源
《Journal of Electronic Materials》 |2007年第8期|共4页
作者
STEVE PRICE; LARRY WANG; ALICE WANG;
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原文格式 PDF
正文语种 eng
中图分类材料;
关键词
SIMS; TOF-SIMS; HgCdTe; impurities; Na; Cu;

机译：SIMS;TOF-SIMS;HgCdTe;杂质;Na;Cu;

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1. Secondary Ion Mass Spectrometry and Time-of-Flight Secondary Ion Mass Spectrometry Study of Impurity Measurements in HgCdTe [J] . STEVE PRICE, LARRY WANG, ALICE WANG Journal of Electronic Materials . 2007,第8期

机译：HgCdTe中杂质测量的二次离子质谱和飞行时间二次离子质谱研究
2. Complementary use of Fourier transform laser microprobe mass spectrometry and time-of-flight static secondary ion mass spectrometry for the study of the surface adsorption of organic dyes on silicate materials [J] . Busuioc AM, De Mondt R, Moisio H, Rapid Communications in Mass Spectrometry: RCM . 2005,第19期

机译：傅里叶变换激光微探针质谱和飞行时间静态次级离子质谱的互补使用，用于研究有机染料在硅酸盐材料上的表面吸附
3. Topography Measurements Using High Mass Resolution Time-of-Flight Secondary Ion Mass Spectrometry: Application to Banknotes [J] . Bejjani Alice, Noun Manale, Della-Negra Srge, Analytical chemistry . 2019,第14期

机译：使用高质量分辨率飞行时间二次离子质谱法的地形测量：应用于钞票
4. Time-of-Flight Secondary Ion Mass Spectrometry Application to the Study of Surface Modifications [C] . Y. De Puydt, M. Repoux, F. Delamare Surface Modification Technologies . 1998

机译：飞行时间二次离子质谱施用在表面修饰研究中
5. Surface studies of polymeric controlled drug delivery systems using X -ray photoelectron spectrometry and time-of-flight secondary ion mass spectrometry [D] . Yu, Jinxiang 2006

机译：使用X射线光电子能谱和飞行时间二次离子质谱仪对聚合物控制的药物输送系统进行表面研究
6. High throughput discovery of thermo-responsive materials using water contact angle measurements and time-of-flight secondary ion mass spectrometry [O] . Andrew L Hook, David J Scurr, Daniel G Anderson, -1

机译：使用水接触角测量和飞行时间二次离子质谱法发现热响应材料的高通量
7. Galvanostatic Rejuvenation of Electrochromic WO3 Thin Films: Ion Trapping and Detrapping Observed by Optical Measurements and by Time-of-Flight Secondary Ion Mass Spectrometry [O] . -1

机译：电致变色WO3薄膜的镀锌恢复：光学测量和通过飞行时间二次离子质谱法观察的离子捕获和脱节
8. Development and Application of SIMS (Secondary Ion Mass Spectrometry) Characterization Techniques for the Study of Impurities and Impurity Motion in HgCdTe and CdTe [R] . Evans, C. A. 1983

机译：用于研究HgCdTe和CdTe中杂质和杂质运动的sIms（二次离子质谱）表征技术的开发与应用

Secondary Ion Mass Spectrometry and Time-of-Flight Secondary Ion Mass Spectrometry Study of Impurity Measurements in HgCdTe

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