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首页> 外文期刊>Journal of Materials Science >THE EFFECTS OF SUBSTRATES ON THE THIN-FILM STRUCTURES OF BATIO3
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THE EFFECTS OF SUBSTRATES ON THE THIN-FILM STRUCTURES OF BATIO3

机译：基质对BATIO3薄膜结构的影响

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Barium titanate (BaTiO3) thin films prepared on magnesia, silicon and strontium titanate substrates by r.f. sputtering has been investigated. As a function of substrate and annealing temperatures, the crystal structure and shape were examined by X-ray diffraction and scanning electron microscopy. Thin films were grown on both MgO and silicon substrates; they were amorphous when deposited on MgO if the substrate temperature was less than 450 degrees C, while for those grown on silicon the temperature had to be less than 500 degrees C. Above these elevated temperatures, the films were crystalline, with cubic symmetry. After annealing the thin firms on magnesia, the crystal structure changed from cubic to tetragonal phase above 1100 degrees C; the annealing thus caused the grain growth of the BaTiO3. The thin films on SrTiO3 were found to be c-axis oriented tetragonal films for a substrate temperature above 500 degrees C. [References: 11]
机译：钛酸钡（BaTiO3）薄膜通过r.f.法在氧化镁，硅和钛酸锶衬底上制备已经研究了溅射。作为衬底和退火温度的函数，通过X射线衍射和扫描电子显微镜检查晶体结构和形状。在MgO和硅衬底上均生长了薄膜。如果衬底温度低于450摄氏度，则当沉积在MgO上时它们是非晶态的;而对于那些生长在硅上的衬底，温度必须低于500摄氏度。在这些升高的温度之上，薄膜是晶体，具有立方对称性。在氧化镁上使薄的硬质合金退火后，在1100摄氏度以上，晶体结构从立方相变为四方相;在1100℃以下，晶体结构从立方相变为四方相。因此，退火导致BaTiO3的晶粒长大。发现SrTiO3上的薄膜是c轴取向的四边形薄膜，衬底温度超过500摄氏度。[参考文献：11]

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