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首页> 外文期刊>Journal of Mechanical Science and Technology >Motion Error Compensation Method for Hydrostatic Tables Using Actively Controlled Capillaries
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Motion Error Compensation Method for Hydrostatic Tables Using Actively Controlled Capillaries

机译：主动控制毛细管的静压工作台运动误差补偿方法

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摘要

To compensate for the motion errors in hydrostatic tables, a method to actively control the clearance of a bearing corresponding to the amount of error using actively controlled capillaries is introduced in this paper. The design method for an actively controlled capillary that considers the output rate of a piezo actuator and the amount of error that must be corrected is described. The basic characteristics of such a system were tested, such as the maximum controllable range of the error, micro-step response, and available dynamic bandwidth when the capillary was installed in a hydrostatic table. The tests demonstrated that the maximum controllable range was 2.4 μm, the resolution was 27 nm, and the frequency bandwidth was 5.5 Hz. Simultaneous compensation of the linear and angular motion errors using two actively controlled capillaries was also performed for a hydrostatic table driven by a ballscrew and a DC servomotor. An iterative compensation method was applied to improve the compensation characteristics. Experimental results showed that the linear and angular motion errors were improved to 0.12 μm and 0.20 arcsec, which were about 1/15th and 1/6th of the initial motion errors, respectively. These results confirmed that the proposed compensation method improves the motion accuracy of hydrostatic tables very effectively.
机译：为了补偿静液压工作台中的运动误差，本文介绍了一种利用主动控制的毛细管主动控制与误差量相对应的轴承游隙的方法。描述了一种主动控制毛细管的设计方法，该方法考虑了压电执行器的输出速率和必须纠正的误差量。测试了该系统的基本特征，例如，当将毛细管安装在静水压台中时，误差的最大可控制范围，微步响应和可用动态带宽。测试表明，最大可控范围为2.4μm，分辨率为27 nm，频率带宽为5.5 Hz。对于由滚珠丝杠和直流伺服电机驱动的静液压工作台，还使用两个主动控制的毛细管同时补偿了线性和角运动误差。应用迭代补偿方法来改善补偿特性。实验结果表明，线性和角运动误差分别提高到0.12μm和0.20 arcsec，分别约为初始运动误差的1/15和1/6。这些结果证实了所提出的补偿方法非常有效地提高了静液压工作台的运动精度。

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