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首页> 外文期刊>Journal of nanoscience and nanotechnology >Maskless Laser Direct Patterning of PEDOT/PSS Layer for Soluble Process Organic Thin Film Transistor
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Maskless Laser Direct Patterning of PEDOT/PSS Layer for Soluble Process Organic Thin Film Transistor

机译：用于可溶性工艺有机薄膜晶体管的PEDOT / PSS层的无掩模激光直接图案化

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摘要

In this work, we have fabricated TIPS-pentacene TFTs with conductive polymer (3,4-ethylenedioxythiophene):poly(4-stylenesulfonate) (PEDOTPSS) source/drain electrodes which is patterned by maskless laser direct patterning (LDP). The 5-μm resolution of source and drain patterns with PEDOP.PSS were clearly defined. Furthermore, the OTFTs with 10-μm channel length were successfully achieved by exposing the focused Neodymium:Yttrium Aluminum Garnet (Nd:YAG) laser beam onto the spin-coated PEDOTPSS films and developing with deionized water. The electrical performance of the TIPS-pentacene TFTs with PEDOT:PSS source/drain electrodes were improved with decrease of the sheet resistance of PEDOTPSS films when the PEDOT:PSS films were annealed at the temperature above 200℃.
机译：在这项工作中，我们用导电聚合物（3,4-乙撑二氧噻吩）：聚（4-苯乙烯磺酸盐）（PEDOTPSS）源/漏电极制作了TIPS-并五苯TFT，并通过无掩模激光直接图案化（LDP）对其进行了图案化。明确定义了PEDOP.PSS的源极和漏极图案的5μm分辨率。此外，通过将聚焦的钕：钇铝石榴石（Nd：YAG）激光束照射到旋涂的PEDOTPSS膜上，并用去离子水显影，可以成功实现10μm沟道长度的OTFT。当PEDOT：PSS薄膜在200℃以上的温度下退火时，随着PEDOTPSS薄膜的薄层电阻的减小，具有PEDOT：PSS源/漏电极的TIPS并五苯TFT的电性能得以改善。

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