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Characterization of N-Doped Polycrystalline Diamond Films Deposited on Microgrinding Tools

机译:微研磨工具上沉积的N掺杂多晶金刚石薄膜的表征

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摘要

Chemical vapor deposited diamond films have many industrial applications but are assuming increasing importance in the area of microengineering, most notably in the development of diamond coated micro-grinding tools. For these applications the control of structure and morphology is of critical importance. The crystallite size, orientation, surface roughness, and the degree of sp3 character have a profound effect on the tribological properties of the films deposited. In this article, we present experimental results on the effects of nitrogen doping on the surface morphology, crystallite size, and wear of microgrinding tools. The sp3 character optimizes at 200 ppm nitrogen, and above this value the surface becomes much smoother and crystal sizes decrease considerably. Fracture-induced wear of the diamond grain is the most important mechanism of material removal from a microgrinding tool during the grinding process. Fracture occurs as a consequence of tensile stresses induced into diamond grains by grinding forces to which they are subjected. The relationship between the wear of diamond coated grinding tools, component grinding forces, and induced stresses in the model diamond grains is described in detail. A significant correlation was found between the maximum value of tensile stress induced in the diamond grain and the appropriate wheel-wear parameter (grinding ratio). It was concluded that the magnitude of tensile stresses induced in the diamond grain by grinding forces at the rake face is the best indicator of tool wear during the grinding process.
机译:化学气相沉积的金刚石膜具有许多工业应用,但是在微工程领域,尤其是在金刚石涂层的微研磨工具的开发中,正变得越来越重要。对于这些应用,结构和形态的控制至关重要。微晶尺寸,取向,表面粗糙度和sp3特征程度对沉积膜的摩擦学性能具有深远的影响。在本文中,我们介绍了氮掺杂对微粉碎工具的表面形态,微晶尺寸和磨损的影响的实验结果。在氮含量为200 ppm时,sp3特性得以优化,超过此值,表面变得更加光滑,晶体尺寸大大减小。金刚石颗粒的断裂引起的磨损是在研磨过程中从微研磨工具去除材料的最重要机制。断裂是由于金刚石所承受的磨削力引起的金刚石晶粒中的拉应力而产生的。详细描述了金刚石涂层磨具的磨损,部件磨削力和模型金刚石晶粒中的感应应力之间的关系。发现在金刚石晶粒中引起的拉应力的最大值与适当的车轮磨损参数(磨削比)之间存在显着的相关性。结论是,前刀面的磨削力在金刚石晶粒中引起的拉应力大小是磨削过程中刀具磨损的最佳指示。

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