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首页> 外文期刊>Journal of Materials Engineering and Performance >Surface Characterization of (111) and (10(1) Textured Diamond Coatings Deposited to Silicon
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Surface Characterization of (111) and (10(1) Textured Diamond Coatings Deposited to Silicon

机译：沉积在硅上的（111）和（10（1）质感金刚石涂层的表面表征

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The use of diamond for infrared (IR) transmitting applications is of paramount importance to the defense industries. Diamond-coated IR transmitting materials are used on smart weapons and aircraft that use substrate materials such as silicon and germanium. In this investigation, diamond sheets were deposited using chemical vapor deposition. The as-grown diamond sheets were characterized for hydrogen content using detailed IR analysis. The deconvolution of the spectra in a three-phonon region (2700-3150 cm~(-1)) showed a number of vibration modes corresponding to the spm CRn phase of carbon. The spectra representing (100) and (111) textured diamond sheets, grown under different conditions, were compared. The (100) textured sheets contained two dominant peaks centered at 2860 and 2930 cm~(-1), which correspond to the symmetric and asymmetric stretch bands of the CH2 group. However, the sheet with (111) texture displayed multiple CH, CH2, and CH3 peaks on the spectrum. Using a standard sample called polymethyl methacrylate with known concentration, the hydrogen content associated with various modes was evaluated in the diamond sheets. IR active hydrogen in the chemical vapor deposited diamond sheets was also calculated by evaluating the area of the IR band. A discrepancy of one order of magnitude was found in the calculated and measured value. Using these measurements we suggest that the oscillator strength of the different IR modes varies depending upon the structure and H content of CVD diamond sheets.
机译：对于国防工业来说，将钻石用于红外（IR）传输应用至关重要。涂有金刚石的红外传输材料可用于使用基体材料（例如硅和锗）的智能武器和飞机。在这项研究中，使用化学气相沉积法沉积了金刚石片。使用详细的红外分析对刚生长的金刚石薄板的氢含量进行了表征。在三声子区域（2700-3150 cm〜（-1））处的光谱解卷积显示出许多与碳的spm CRn相对应的振动模式。比较了代表在不同条件下生长的（100）和（111）织纹金刚石片的光谱。 （100）织构片包含两个主峰，分别位于2860和2930 cm-1（-1）中心，分别对应于CH2组的对称和不对称拉伸带。但是，具有（111）纹理的纸张在光谱上显示了多个CH，CH2和CH3峰。使用已知浓度的称为聚甲基丙烯酸甲酯的标准样品，在金刚石片中评估了与各种模式相关的氢含量。还通过评估IR带的面积来计算化学气相沉积金刚石片中的IR活性氢。在计算值和测量值中发现一个数量级的差异。使用这些测量结果，我们建议不同的IR模式的振荡器强度取决于CVD金刚石片的结构和H含量而变化。

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