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首页> 外文期刊>Journal of Materials Engineering and Performance >Experimental and Gas Phase Modeling of Nanocrystalline Diamond Films Grown on Titanium Alloys for Biomedical Applications
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Experimental and Gas Phase Modeling of Nanocrystalline Diamond Films Grown on Titanium Alloys for Biomedical Applications

机译：生物医学应用钛合金上生长的纳米晶金刚石薄膜的实验和气相建模

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摘要

For biomedical applications, it is highly desirable to be able to deposit smooth adherent diamond films on various complex-shaped substrates using the hot filament chemical vapor deposition technique (HFCVD). The properties of these films are affected profoundly by process parameters such as filament temperature, gas composition, and pressure. In this study, we present an insight into the gas phase chemistry involved in HFCVD of smooth nanocrystalline diamond films using Ar/CH_4/H_2 precursor mixtures. Experimental results on the growth, surface morphology, and crystalline structure are also presented. It is evident that the addition of a noble gas such as argon has a considerable effect on the gas surface chemistry. Notably at high concentrations of inert gas dilution (>90 vol. percent argon) there are significant changes in diamond crystallinity ranging from polycrystalline through macrocrystalline, and at argon concentrations >98 vol. percent, nanocrystalline facets are observed. Modeling of the gas phase chemistry showed that the relative concentrations of CH_3 and C_2H alter significantly in this region, and these in turn influence surface morphology and crystallinity of the deposited films.
机译：对于生物医学应用，非常希望能够使用热丝化学气相沉积技术（HFCVD）在各种复杂形状的基底上沉积光滑的附着金刚石薄膜。这些薄膜的性能会受到工艺参数（例如灯丝温度，气体成分和压力）的深刻影响。在这项研究中，我们提供了对使用Ar / CH_4 / H_2前体混合物的光滑纳米晶金刚石薄膜进行HFCVD的气相化学的认识。还给出了有关生长，表面形态和晶体结构的实验结果。显然，稀有气体如氩气的加入对气体表面化学有相当大的影响。值得注意的是，在高浓度的惰性气体稀释（> 90％体积的氩气）下，金刚石的结晶度发生了显着变化，范围从多晶到大晶，在氩气浓度> 98％的体积下。 ％，观察到纳米晶面。气相化学模型表明，CH_3和C_2H的相对浓度在该区域发生明显变化，这些反过来又影响沉积膜的表面形态和结晶度。

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