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首页> 外文期刊>Journal of Materials Engineering and Performance >Magnetic Properties, Microwave Characteristics, and Thermal Stability of the FeCoAlN Films
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Magnetic Properties, Microwave Characteristics, and Thermal Stability of the FeCoAlN Films

机译：FeCoAlN薄膜的磁性，微波特性和热稳定性

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摘要

FeCoAlN films were prepared by reactive radio frequency magnetron co-sputtering technique in an argon and nitrogen mixture atmosphere. The soft magnetic properties, GHz dynamic properties, and magnetic thermal stability of the FeCoAlN films were investigated. The FeCoAlN films deposited at N_2/(Ar + N_2) gas flux percentages larger than 8% have amorphous structure. The (Fe_(64.8)Co_(35.2))_(96.3)Al_(3.7)N film as-deposited at the N_2/(Ar + N_2) gas flux percentage of 9% has good magnetic softness and uniaxial in-plane anisotropy, as demonstrated by the typical hysteresis loops along easy and hard axis. The magnetic thermal stability of the FeCoN films can be obviously improved by introduction of a high Al content. The (Fe_(64.8)Co_(35.2))_(86.5)Al_(13.5)N films annealed at 400 ℃ for 1 h exhibit good magnetic softness and GHz dynamic properties with a saturation magnetization (μ_0M_s) of 1.21 T, an easy axis coercive field (H_(ce)) of 8.5 Oe, an anisotropy field (H_k) of 35 Oe, a ferromagnetic resonance frequency (f_r) of 1.89 GHz, and a real part of permeability (μ') of 380. The dynamic characteristics can be described by the theoretical model based on Landau-Lifshitz-Gilbert (L-L-G) equation and eddy current dynamics.
机译：FeCoAlN薄膜是在氩气和氮气的混合气氛中通过反应性射频磁控共溅射技术制备的。研究了FeCoAlN薄膜的软磁性能，GHz动态性能和磁热稳定性。以N_2 /（Ar + N_2）气体通量百分比大于8％沉积的FeCoAlN薄膜具有非晶结构。以9％的N_2 /（Ar + N_2）气体通量百分比沉积的（Fe_（64.8）Co_（35.2））_（96.3）Al_（3.7）N膜具有良好的磁软度和单轴面内各向异性，如沿易轴和硬轴的典型磁滞回线所示。通过引入高Al含量，可以明显改善FeCoN膜的磁热稳定性。 （Fe_（64.8）Co_（35.2））_（86.5）Al_（13.5）N薄膜在400℃下退火1 h，具有良好的磁软度和GHz动态特性，其饱和磁化强度（μ_0M_s）为1.21 T，易轴矫顽场（H_（ce））为8.5 Oe，各向异性场（H_k）为35 Oe，铁磁共振频率（f_r）为1.89 GHz，磁导率的实部（μ'）为380。动态特性可以由基于Landau-Lifshitz-Gilbert（LLG）方程和涡流动力学的理论模型描述。

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