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首页> 外文期刊>Journal of Materials Engineering and Performance >Preparation of Silicon Carbide Coatings from Liquid Carbosilanes by Chemical Vapor Deposition
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Preparation of Silicon Carbide Coatings from Liquid Carbosilanes by Chemical Vapor Deposition

机译：化学气相沉积法从液态碳硅烷制备碳化硅涂层

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摘要

Liquid carbosilanes which were synthesized from polydimethylsilane (PDMS) were analyzed by infrared spectra (IR) and H-nuclear magnetic resonance (NMR). Silicon carbide coatings were prepared by chemical vapor deposition from liquid carbosilanes onto several different substrates. The coatings were characterized by scanning electron microscopy (SEM), x-ray diffraction (XRD), and IR. The results show that liquid carbosilanes are mixtures of several oligomers which have Si-C backbone. The coatings prepared at 850 deg C contain some organic segments, and those prepared at 900 deg C are comparatively pure SiC which is partly crystallized. The coatings are glazed and very hard.
机译：由聚二甲基硅烷（PDMS）合成的液态碳硅烷通过红外光谱（IR）和H核磁共振（NMR）进行分析。通过从液态碳硅烷化学气相沉积到几种不同的基材上来制备碳化硅涂层。通过扫描电子显微镜（SEM），X射线衍射（XRD）和IR对涂层进行表征。结果表明，液态碳硅烷是几种具有Si-C主链的低聚物的混合物。在850摄氏度下制备的涂层含有一些有机链段，而在900摄氏度下制备的涂层则是部分结晶的相对纯净的SiC。涂层光滑且非常坚硬。

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