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首页> 外文期刊>Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites >Structure evolution of fluorinated diamond-like carbon films prepared at varying source gas flow ratios
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Structure evolution of fluorinated diamond-like carbon films prepared at varying source gas flow ratios

机译：以不同的原料气流量比制备的氟化类金刚石碳膜的结构演变

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The F-DLC films with high fluorine content were prepared by reactive magnetron sputtering with trifluromethane (CHF3)/argon as source gases and pure graphite as a target. The influence of source gas flow ratios on the film bonding configuration, SP2/SP3 hybridization ratio and optical band gap were investigated by Raman, infrared absorption, UV-VIS spectra and XPS spectra. The results show that the skeleton structures of the samples were aromatic rings with attached fluorine (F-aryl), and the strongest vibration modes in CFx modes were CF2 modes. Some aromatic rings without fluorine attached were found in FTIR spectra of the films, which indicated that incorporation of fluorine atoms may lead to a significant distortion of the aromatic rings symmetry and turn the C=C bonds into IR-active. The optical band gaps and C-F, bonding states stability of the films were affected not only by fluorine content in the films but also by the bonding configuration. The films with high fluorine content and low C=C bonding states will have wide optical band gaps. (c) 2005 Elsevier B.V. All rights reserved.
机译：以三氟甲烷（CHF3）/氩气为原料气，以纯石墨为靶，通过反应磁控溅射制备了高氟含量的F-DLC薄膜。通过拉曼光谱，红外吸收光谱，UV-VIS光谱和XPS光谱研究了原料气体流量比对薄膜键合构型，SP2 / SP3杂化比和光学带隙的影响。结果表明，样品的骨架结构为附有氟的芳环（F-芳基），CFx模式中最强的振动模式为CF2模式。在薄膜的FTIR光谱中发现了一些未连接氟的芳环，这表明氟原子的掺入可能导致芳环对称性显着变形，并使C = C键转变为IR活性。膜的光学带隙和C-F，键合状态的稳定性不仅受到膜中氟含量的影响，还受到键合构型的影响。具有高氟含量和低C ＝ C键合态的膜将具有宽的光学带隙。 （c）2005 Elsevier B.V.保留所有权利。

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