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首页> 外文期刊>Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites >The role of hydrogen in the process of successive laser crystallization of hydrogenated amorphous silicon
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The role of hydrogen in the process of successive laser crystallization of hydrogenated amorphous silicon

机译：氢在氢化非晶硅连续激光结晶过程中的作用

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摘要

Amorphous films containing hydrogen have been crystallized by employing a combined laser dehydrogenation/crystallization technique. Structural changes during the successive crystallization were detected by Raman measurements. The dehydrogenation was monitored by secondary ion mass spectroscopy and by measuring the Si-H-X stretching vibrations using Raman spectroscopy. In the course of successive crystallization a two layer system is created with a crystallized layer on top of an amorphous layer. Experimentally obtained threshold laser energy densities of crystallization confirm theoretical predictions. During the laser dehydrogenation the vibrational band at 2000 cm(-1) decreases faster than the vibrational band at similar to 2080 cm(-1). Secondary ion mass spectroscopy measurements show that fully crystallized films still contain hydrogen concentrations less than or equal to 5 at.%. (C) 2000 Published by Elsevier Science B.V. All rights reserved. [References: 11]
机译：通过使用组合的激光脱氢/结晶技术已经使含有氢的非晶膜结晶。通过拉曼测量来检测连续结晶过程中的结构变化。通过二次离子质谱法和通过使用拉曼光谱法测量Si-H-X拉伸振动来监测脱氢。在连续结晶的过程中，形成了两层系统，在非晶层的顶部具有结晶层。实验获得的阈值激光结晶能量密度证实了理论预测。在激光脱氢过程中，在2000 cm（-1）处的振动带比在类似2080 cm（-1）处的振动带下降得更快。二次离子质谱法测量表明，完全结晶的膜仍含有小于或等于5 at。％的氢浓度。 （C）2000，Elsevier Science B.V.保留所有权利。 [参考：11]

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