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首页> 外文期刊>Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites >Light-induced effects in hydrogenated amorphous silicon films grown from high hydrogen dilution of silane
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Light-induced effects in hydrogenated amorphous silicon films grown from high hydrogen dilution of silane

机译：高氢稀释硅烷对氢化非晶硅膜的光诱导效应

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摘要

Light-induced effects have been studied in a series of hydrogenated amorphous silicon (a-Si:H) films grown from different hydrogen (H,) dilution ratio of silane, R (= [SiH4]/([H-2] + [SiH4]). The light-induced changes were monitored using photoconductivity and sub-gap absorption measurements, It is found that the light-induced changes are nearly independent of H-2 dilution ratio between R = 100% and R = 40% but the change rapidly decreases with decreasing the R. For the high H-diluted films (less than R approximate to 10%) the change is so small as to be negligible, despite large hydrogen content, The hydrogen evolution spectra are decomposed into two components: low and high temperature peaks. It is found that there is a close correlation between the volume fraction of the integrated intensity of the low temperature peak and the improvement of stability. From these results it is suggested that the hydrogen clusters play a dominant role in improving the stability of high H-2-diluted a-Si:H films. (C) 2002 Elsevier Science B.V. All rights reserved. [References: 12]
机译：在一系列的氢化非晶硅（a-Si：H）薄膜中研究了光诱导效应，该薄膜由不同的氢（H）硅烷稀释比R（= [SiH4] /（[H-2] + [ SiH4]）。使用光电导和亚间隙吸收测量来监测光诱导的变化，发现光诱导的变化几乎与H = 2的稀释比无关，R = 100％和R = 40％，但是随R的减小，变化迅速减小。对于高H稀释的薄膜（小于R约10％），变化很小，可以忽略不计，尽管氢含量很高。析氢光谱分解为两个分量：低发现低温峰的积分强度的体积分数与稳定性的提高之间存在密切的相关性，从这些结果表明，氢原子团簇在提高氢原子团数方面起着主导作用。高H-2-稀释的a-的稳定性Si：H膜。 （C）2002 Elsevier Science B.V.保留所有权利。 [参考：12]

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