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首页> 外文期刊>Journal of Micromechanics and Microengineering >Modeling in-plane misalignments in lateral combdrive transducers
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Modeling in-plane misalignments in lateral combdrive transducers

机译：模拟横向梳状驱动换能器中的平面内未对准

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The misalignment of lateral combdrive fingers was studied using analytical and finite element modeling techniques. Based on the principle of virtual work, the required driving force, and the forces and moments that develop during in-plane combdrive misalignment were analytically calculated. Electrostatic uncoupled 2D and 3D finite element models were then used to perform energy computations during misalignment. Finally, a stability analysis of misaligned combdrive fingers was performed using a coupled 2D finite element approach. The analytical and numerical results were compared and found to vary due to fringing in the electrostatic fields. The significance of the fringing fields and stability equilibrium states were subsequently discussed with respect to the design of precision MEMS devices. [References: 15]
机译：使用解析和有限元建模技术研究了横向梳齿传动指的未对准。基于虚拟工作原理，分析计算了所需的驱动力以及平面梳状驱动器未对准时产生的力和力矩。然后使用静电未耦合的2D和3D有限元模型在未对准期间执行能量计算。最后，使用耦合的2D有限元方法对未对准的梳齿传动齿进行了稳定性分析。比较了分析结果和数值结果，发现由于静电场中的条纹而有所不同。随后，关于精密MEMS器件的设计，讨论了边缘场和稳定性平衡状态的重要性。 [参考：15]

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