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首页> 外文期刊>Journal of Micromechanics and Microengineering >Polyimide microfluidic devices with integrated nanoporous filtration areas manufactured by micromachining and ion track technology
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Polyimide microfluidic devices with integrated nanoporous filtration areas manufactured by micromachining and ion track technology

机译：通过微加工和离子跟踪技术制造的具有集成纳米孔过滤区域的聚酰亚胺微流体装置

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This paper reports on polyimide microfluidic devices fabricated by photolithography and a layer transfer lamination technology. The microchannels are sealed by laminating an uncured polyimide film on a partially cured layer and subsequent imidization. Selected areas of the microchannels were irradiated with heavy ions of several hundred MeV and the generated ion tracks are chemically etched to submicron pores of high aspect ratio. The ion beam parameters and the track etching conditions define density, length, diameter and shape of the pores. Membrane permeability and separation performance is demonstrated in cross-flow filtration experiments. The devices can be used for selective delivery or probing of fluids to biological tissue, e.g. drug delivery or microdialysis. For chip-based devices the filters can be used as a sample pre-treatment unit for filtration or concentration of particles or molecules. [References: 23]
机译：本文报道了通过光刻和层转移层压技术制造的聚酰亚胺微流体器件。通过将未固化的聚酰亚胺膜层压在部分固化的层上并随后进行酰亚胺化来密封微通道。用几百MeV的重离子辐照微通道的选定区域，并将产生的离子轨迹化学蚀刻到高纵横比的亚微米孔中。离子束参数和轨迹蚀刻条件定义了孔的密度，长度，直径和形状。错流过滤实验证明了膜的渗透性和分离性能。所述装置可以用于将流体选择性地递送或探测到生物组织，例如生物体组织。药物输送或微透析。对于基于芯片的设备，过滤器可以用作样品预处理单元，以过滤或浓缩颗粒或分子。 [参考：23]

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