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首页> 外文期刊>Journal of Microlithography, Microfabrication, and Microsystems. (JM3) >Micromachined electromagnetic variable optical attenuator for optical power equalization
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Micromachined electromagnetic variable optical attenuator for optical power equalization

机译：用于光功率均衡的微机械电磁可变光衰减器

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摘要

A novel micromachined electromagnetic actuated variable optical attenuator is described. The attenuation level is adjusted by changing the lateral distance between two V-groove-aligned single-mode fibers. Based on the waveguide transmission theory, the relationship between the attenuation and the offset is analyzed. The fabrication of the device only enrolls common and well-known semiconductor technologies. The packaged volume of the device is 20 × 10×5 mm{sup}3. According to the experiment results, the insertion loss is less than 1 dB, the polarization dependent loss is less than 0.1 dB, dynamic range is larger than 50 dB, and the driving voltage is less than 5V. It is proven to be a low-cost, high-performance passive device for future all-optical networks.
机译：描述了一种新颖的微机械电磁致动可变光衰减器。通过改变两条V形槽对齐的单模光纤之间的横向距离来调节衰减水平。基于波导传输理论，分析了衰减与失调之间的关系。装置的制造仅涉及普通和众所周知的半导体技术。该设备的包装体积为20×10×5 mm {sup} 3。根据实验结果，插入损耗小于1 dB，偏振相关损耗小于0.1 dB，动态范围大于50 dB，驱动电压小于5V。它被证明是用于未来全光网络的低成本，高性能无源设备。

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