Advanced sacrificial poly-Si technology for fluidic systems

Berenschot JW.; Tas NR.; Lammerink TSJ.; Elwenspoek M.; van den Berg A.

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Advanced sacrificial poly-Si technology for fluidic systems

机译：用于流体系统的先进牺牲多晶硅技术

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Sacrificial poly-Si etching can be used to create thin cavities and channels. By combining it with anisotropic KOH etching of a mono-Si substrate, important components for fluidic systems., such as V-grooved channels, thin sandwiched channels, channel crossings and membrane filters and injectors, have been fabricated in a single etch step. [References: 7]

机译：牺牲多晶硅蚀刻可用于创建薄型腔和通道。通过将其与单晶硅衬底的各向异性KOH蚀刻相结合，可在单个蚀刻步骤中制造出流体系统的重要组件，例如V型槽，薄夹层通道，通道交叉点和膜过滤器和注入器。 [参考：7]

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《Journal of Micromechanics and Microengineering》 |2002年第5期|共4页
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Berenschot JW.; Tas NR.; Lammerink TSJ.; Elwenspoek M.; van den Berg A.;
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1. Advanced sacrificial poly-Si technology for fluidic systems [J] . Berenschot JW., Tas NR., Lammerink TSJ., Journal of Micromechanics and Microengineering . 2002,第5期

机译：用于流体系统的先进牺牲多晶硅技术
2. Development of an Advanced Evaporation System with Fouling-Free Technology Using a Circulating Fluidized Bed Heat Exchanger [J] . Hyeon Cheol Lee, Guyoung Kang, Yoon Pyo Lee, Environmental Engineering Science . 2003,第4期

机译：利用循环流化床换热器开发无污垢技术的先进蒸发系统
3. Toward Portable Artificial Kidneys: The Role of Advanced Microfluidics and Membrane Technologies in Implantable Systems [J] . Bac Van Dang, Robert A. Taylor, Alexander J. Charlton, Biomedical Engineering, IEEE Reviews in . 2020,第期

机译：朝向便携式人工肾脏：先进的微流体和膜技术在植入系统中的作用
4. Fluidized-bed technology enabling the integration of high temperature solar receiver CSP systems with steam and advanced power cycles [C] . B. Sakadjian, S. Hu, M. Maryamchik International Conference on Concentrating Solar Power and Chemical Energy Systems . 2015

机译：流化床技术能够与蒸汽和高级电源周期集成高温太阳能接收器CSP系统
5. The application of magnetic particles in micro-fluidic systems for advanced immunoassays. [D] . Lee, Jun-Tae. 2012

机译：磁性粒子在微流体系统中的应用，可用于高级免疫分析。
6. Focus Issue on Vector Systems for Plant Research and Biotechnology: Advanced Expression Vector Systems: New Weapons for Plant Research and Biotechnology [O] . Tzvi Tzfira, Stanislav V. Kozlovsky, Vitaly Citovsky 2007

机译：植物研究和生物技术载体系统的重点问题：高级表达载体系统：植物研究和生物技术的新武器
7. Fluidized-bed Technology Enabling the Integration of High Temperature Solar Receiver CSP Systems with Steam and Advanced Power Cycles [O] . Sakadjian B., Hu S., Maryamchik M., 2015

机译：流化床技术可将高温太阳能接收器CSP系统与蒸汽和高级功率循环集成在一起
8. Generic Studies of Advanced Fluid Bed Air Heater Technology. Topical Report Number 6. Costs and Economic Analyses of the Generic Fluid Bed Air Heater Systems [R] . Maxwell, B. P., Horazak, D. A. 1986

机译：先进流化床空气加热器技术的通用研究。专题报告编号6.通用流化床空气加热器系统的成本和经济分析

Advanced sacrificial poly-Si technology for fluidic systems

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