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首页> 外文期刊>Journal of Micromechanics and Microengineering >Design and fabrication of an integrated microsystem for microcapillary electrophoresis
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Design and fabrication of an integrated microsystem for microcapillary electrophoresis

机译：用于微毛细管电泳的集成微系统的设计和制造

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A capillary electrophoresis microsystem integrated with feed-through platinum electrodes was designed and fabricated for the separation of DNA fragments. A novel glass-to-silicon bonding technology, which allows anodic bonding of a glass wafer to a silicon wafer coated with a thick dielectric film by the inclusion of a thin intermediate amorphous silicon layer, was developed and employed to construct the microsystem. Despite the existence of a thick insulating material and non-uniform topography, robust devices without fluid leakage were obtained. Electrophoretic manipulation and separation of DNA fragments after capillary pre-treatment have been demonstrated and several operational considerations are discussed. The system performance suggests that silicon-based microsystems can be advantageous and practical for the fabrication of integrated microcapillary electrophoresis devices. [References: 22]
机译：设计并制造了带有穿通铂电极的毛细管电泳微系统，用于分离DNA片段。开发了一种新颖的玻璃-硅键合技术，该技术允许通过将薄的非晶硅中间层包含在内而将玻璃晶片阳极键合到涂有厚介电膜的硅晶片上，并将其用于构建微系统。尽管存在厚的绝缘材料和不均匀的形貌，但仍获得了没有流体泄漏的坚固装置。已经证明了毛细管预处理后的电泳操作和DNA片段的分离，并讨论了一些操作上的考虑。系统性能表明，基于硅的微系统对于集成微毛细管电泳装置的制造可能是有利且实用的。 [参考：22]

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