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首页> 外文期刊>Journal of Micromechanics and Microengineering >Large deflections of microbeams under electrostatic loads
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Large deflections of microbeams under electrostatic loads

机译：静电载荷下微束的大挠度

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Electrostatic actuated microbeams are frequently encountered in micro electro-mechanical systems (MEMS). The behaviour of these devices is characterized by electromechanical coupling, due to the mutual interaction between the electrostatic field and the deflection of the structure. Besides the non-linearity due to the coupling, geometrical non-linearities due to the microstructure's large deflections can sometimes arise. In this work, a new FEM method based on a sequential field-coupling (SFC) approach is proposed, in which electrostatic loads are gradually applied to the deformed shape of the structure. The solutions are compared with those obtained by means of the best-known numerical methods available in the literature. In the case of voltage values that generate large displacements, the proposed method appears more suitable to describe the microbeam behaviour; in particular, the voltage at which instability occurs can be evaluated and post-instability solutions can also be predicted. [References: 25]
机译：在微机电系统（MEMS）中经常会遇到静电驱动的微束。由于静电场和结构的偏转之间的相互作用，这些设备的行为以机电耦合为特征。除了由于耦合引起的非线性外，有时还会由于微观结构的大变形而产生几何非线性。在这项工作中，提出了一种基于顺序场耦合（SFC）方法的新的有限元方法，其中将静电载荷逐渐施加到结构的变形形状上。将该解决方案与通过文献中可获得的最著名的数值方法获得的解决方案进行比较。在产生较大位移的电压值的情况下，所提出的方法似乎更适合描述微束行为。特别地，可以评估发生不稳定性的电压，还可以预测不稳定性后的解决方案。 [参考：25]

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