...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Journal of Micromechanics and Microengineering >Closed-form expressions for pull-in parameters of two-degree-of-freedom torsional microactuators
【24h】

Closed-form expressions for pull-in parameters of two-degree-of-freedom torsional microactuators

机译：二自由度扭转微执行器的引入参数的闭式表达式

获取原文
获取原文并翻译 | 示例
   

获取外文期刊封面封底 >>

       
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

In order to provide the pull-in voltage, angle and height of two-degree-of-freedom (two-DOF) torsional microactuators, closed-form expressions for the pull-in parameters have been successfully obtained from numerical analysis with new formulation of the microactuator. Force and moment balance equations governing the behaviors of the microactuator are obtained as functions of dimensionless force and moment. Thereafter, a mode equation to easily solve the angle and height of the 2-DOF torsional microactuator is derived. A set of the mode equation and the force balance equation is numerically solved for the height and angle of the two-DOF torsional microactuator. For design convenience, closed-form expressions for the pull-in voltage, angle and height are given as functions of the applied voltage and geometry. The theoretical height and angle are in good agreement with experimental data within an error of 2.6% and 4.3%, respectively. As such, the closed-form expressions as well as the developed theory can be used for design and analysis of two-DOF torsional microactuators.
机译：为了提供两自由度（Two-DOF）扭转微执行器的引入电压，角度和高度，已经通过数值分析和新公式化成功地获得了引入参数的闭式表达式。微致动器。获得了控制微执行器性能的力和力矩平衡方程，作为无量纲力和力矩的函数。此后，导出了一个模式方程，可以轻松求解2自由度扭转微执行器的角度和高度。对于二自由度扭转微致动器的高度和角度，数值求解了一组模式方程和力平衡方程。为了设计方便，将引入电压，角度和高度的闭合形式表达式作为所施加电压和几何形状的函数。理论高度和角度与实验数据高度吻合，误差分别为2.6％和4.3％。因此，闭合形式和发达的理论可用于设计和分析两自由度扭转微执行器。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号