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首页> 外文期刊>Journal of Micromechanics and Microengineering >Modeling, simulation and measurement of the dynamic performance of an ohmic contact, electrostatically actuated RF MEMS switch
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Modeling, simulation and measurement of the dynamic performance of an ohmic contact, electrostatically actuated RF MEMS switch

机译：欧姆接触，静电驱动的RF MEMS开关的动态性能的建模，仿真和测量

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In this paper we present a 3D nonlinear dynamic model which describes the transient mechanical analysis of an ohmic contact RF MEMS switch, using finite element analysis in combination with the finite difference method. The model includes real switch geometry, electrostatic actuation, the two- dimensional non- uniform squeeze- film damping effect, the adherence force, and a nonlinear spring to model the interaction between the contact tip and the drain. The ambient gas in the package is assumed to act as an ideal and isothermal fluid which is modeled using the Reynolds squeeze- film equation which includes compressibility and slip flow. A nonlinear contact model has been used for modeling contact between the microswitch tip and the drain electrode during loading. The Johnson - Kendall - Roberts ( JKR) contact model is utilized to calculate the adherence force during unloading. The developed model has been used to simulate the overall dynamic behavior of the MEMS switches including the switching speed, impact force and contact bounce as influenced by actuation voltage, damping, materials properties and geometry. Meanwhile, based on a simple undamped spring - mass system, a dual voltage- pulse actuation scheme, consisting of actuation voltage ( V-a), actuation time ( t(a)), holding voltage ( V-h) and turn- on time ( t(on)), has been developed to improve the dynamic response of the microswitch. It is shown that the bouncing of the switch after initial contact can be eliminated and the impact force during contact can be minimized while maintaining a fast close time by using this open- loop control approach. It is also found that the dynamics of the switch are sensitive to the variations of the shape of the dual pulse scheme. This result suggests that this method may not be as effective as expected if the switch parameters such as threshold voltage, fundamental frequencies, etc. deviate too much from the design parameters. However, it is shown that the dynamic performance may be improved by increasing the damping force. The simulation results obtained from this dynamic model are confirmed by experimental measurement of the RF MEMS switches which were developed at the Northeastern University. It is anticipated that the simulation method can serve as a design tool for dynamic optimization of the microswitch. In addition, the approach of tailoring actuation voltage and the utilization of squeeze- film damping may provide further improvements in the operation of RF MEMS switches.
机译：在本文中，我们提供了一个3D非线性动力学模型，该模型使用有限元分析与有限差分方法相结合，描述了欧姆接触RF MEMS开关的瞬态力学分析。该模型包括实际的开关几何形状，静电致动，二维非均匀挤压膜阻尼效应，附着力和非线性弹簧，用于模拟触点尖端和漏极之间的相互作用。假定包装中的环境气体是理想的等温流体，可使用雷诺挤压膜方程（包括可压缩性和滑流）进行建模。非线性接触模型已用于在加载过程中对微动开关尖端和漏电极之间的接触进行建模。约翰逊-肯德尔-罗伯茨（JKR）接触模型用于计算卸料过程中的附着力。开发的模型已用于模拟MEMS开关的整体动态行为，包括受驱动电压，阻尼，材料特性和几何形状影响的开关速度，冲击力和触点弹跳。同时，基于简单的无阻尼弹簧质量系统，采用双电压脉冲驱动方案，该方案由驱动电压（Va），驱动时间（t（a）），保持电压（Vh）和接通时间（t（ on）），已被开发来改善微动开关的动态响应。结果表明，通过使用这种开环控制方法，可以消除开关在初始接触后的弹跳，并且可以将接触过程中的冲击力降至最低，同时保持快速闭合时间。还发现，开关的动力学对双脉冲方案的形状的变化敏感。该结果表明，如果开关参数（例如阈值电压，基频等）与设计参数相差太大，则该方法可能无法达到预期的效果。然而，显示出可以通过增加阻尼力来改善动态性能。从该动态模型获得的仿真结果通过东北大学开发的RF MEMS开关的实验测量得到了证实。可以预期，仿真方法可以用作微动开关动态优化的设计工具。另外，调整激励电压和利用挤压膜阻尼的方法可以进一步改善RF MEMS开关的操作。

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