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首页> 外文期刊>Journal of Micromechanics and Microengineering >Characterization of the squeeze film damping effect on the quality factor of a microbeam resonator
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Characterization of the squeeze film damping effect on the quality factor of a microbeam resonator

机译:挤压膜阻尼对微束谐振器品质因数的影响

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摘要

The squeeze film damping effect on a beam resonator is analyzed on the basis of the coupled elastic beam theory and the Reynolds equation for isothermal incompressible gas films. Under the condition of small amplitude oscillation, linearization of the governing equations leads to the solution that characterizes the squeeze film damping effect on the beam resonator by two dimensionless parameters. These two parameters, in analogy with the damping and mass parameters of the simple mass-spring-damping system, are completely determined by the physical properties of the beam and gas. It is shown that the calculation of these two parameters can be considerably simplified according to the value of the squeeze number.
机译:基于耦合弹性束理论和等温不可压缩气体膜的雷诺方程,分析了束流谐振器上的挤压膜阻尼效应。在小振幅振荡的条件下,控制方程的线性化导致了通过两个无量纲参数来表征挤压膜对梁谐振器的阻尼效应的解决方案。与简单质量-弹簧-阻尼系统的阻尼和质量参数类似,这两个参数完全由射束和气体的物理特性决定。结果表明,根据挤压数的值,可以大大简化这两个参数的计算。

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