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首页> 外文期刊>Journal of Micromechanics and Microengineering >A novel external electrode configuration for the electrostatic actuation of MEMS based devices
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A novel external electrode configuration for the electrostatic actuation of MEMS based devices

机译：用于基于MEMS的设备的静电致动的新型外部电极配置

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摘要

A novel external electrode concept is introduced and compared with the conventional and often used parallel plate electrode scheme for the electrostatic actuation of micro-electromechanical devices. In contrast to conventional parallel plate actuation, the presented external electrode configuration allows controlled operation of electrostatic actuators over their entire range of motion by avoiding electrostatic instability. The test vehicle for studying deflection versus voltage is a cantilevered beam with a free end, i.e. the worst-case scenario from a stability standpoint. Modeling and fabrication of test devices is discussed and experimental results are presented.
机译：引入了一种新颖的外部电极概念，并将其与常规且经常使用的平行板电极方案进行微机电装置的静电致动。与常规的平行板致动相反，提出的外部电极配置通过避免静电不稳定性而允许静电致动器在其整个运动范围内的受控操作。用于研究挠度与电压的测试工具是具有自由端的悬臂梁，即从稳定性的角度来看，是最坏的情况。讨论了测试设备的建模和制造，并给出了实验结果。

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