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首页> 外文期刊>Journal of Micromechanics and Microengineering >Powder-blasting technology as an alternative tool for microfabrication of capillary electrophoresis chips with integrated conductivity sensors
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Powder-blasting technology as an alternative tool for microfabrication of capillary electrophoresis chips with integrated conductivity sensors

机译：喷粉技术可作为带有集成电导率传感器的毛细管电泳芯片微细加工的替代工具

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The fabrication and characterization of a microfluidic device for capillary electrophoresis applications is presented. The device consists of a glass chip which contains a single separation channel as well as an integrated conductivity detection cell. In contrast to most microfluidic glass devices the channels are not wet etched in HF but machined by the newly developed micro powder-blasting technique which allows the creation of microstructures below 100 mum, and additionally makes parallel hole machining at very low costs outside the cleanroom environment possible [1, 2]. The integration of the conductivity detector was achieved by leading two thin-film metal electrodes inside the separation channel. For rapid sample injection the chip is mounted inside an autosampler-based capillary electrophoresis platform. The detection electrodes for conductivity detection are read out by lock-in amplifier electronics. First measurements show the successful separation of various ions in the sub-millimeter range. [References: 10]
机译：介绍了毛细管电泳应用的微流控设备的制造和表征。该设备由一个玻璃芯片组成，该芯片包含一个分离通道以及一个集成的电导率检测池。与大多数微流体玻璃设备相比，通道不是在HF中湿蚀刻，而是通过新开发的微粉喷丸技术加工而成，该技术允许创建小于100微米的微结构，并且还可以在洁净室环境以外以非常低的成本进行平行孔加工可能的[1，2]。电导检测器的集成是通过在分离通道内引入两个薄膜金属电极来实现的。为了快速进样，将芯片安装在基于自动进样器的毛细管电泳平台内。用于电导率检测的检测电极由锁定放大器电子设备读出。首次测量表明，成功分离了亚毫米范围内的各种离子。 [参考：10]

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