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首页> 外文期刊>Journal of Micromechanics and Microengineering >Modeling of a micro-cantilevered piezo-actuator considering the buffer layer and electrodes
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Modeling of a micro-cantilevered piezo-actuator considering the buffer layer and electrodes

机译：考虑缓冲层和电极的微悬臂压电致动器建模

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摘要

Considering the buffer layer and electrodes, we set up a piezoelectric multilayered cantilever model to evaluate the dynamic performance of the micro-cantilevered piezo-actuator (MCPA) based on Euler-Bernoulli beam theory without considering the residual stresses on the MCPA. Adopting the material and geometric parameters of the previous MCPAs with the different lengths, the first-mode resonance frequency-beam length, the tip deflection-voltage and harmonic response curves are simulated by using the traditional and proposed models, and the results based on the proposed model are much closer to the experimental and finite element simulation results than those based on the traditional model, indicating that the proposed model is valid for evaluating the actuation performances of the MCPA. The effect of the mechanical damping and bending stiffness on the actuation performance of the MCPA is also discussed. Using the proposed model, the dependences of the first-mode resonance frequency and tip deflection of the MCPA on non-piezoelectric layer thicknesses are analyzed at the certain driving voltage. The above-mentioned methods and conclusions can be used for the structure optimized design and performance improvement of MCPAs.
机译：考虑缓冲层和电极，我们建立了一个压电多层悬臂模型，以基于Euler-Bernoulli束理论评估微悬臂压电致动器（MCPA）的动态性能，而没有考虑MCPA上的残余应力。利用以前的不同长度的MCPA的材料和几何参数，使用传统模型和建议模型模拟了第一模式共振频率光束长度，尖端偏转电压和谐波响应曲线，并基于提出的模型比基于传统模型的模型更接近于实验和有限元仿真结果，表明所提出的模型对于评估MCPA的驱动性能是有效的。还讨论了机械阻尼和弯曲刚度对MCPA致动性能的影响。使用所提出的模型，分析了在一定驱动电压下MCPA的第一模式共振频率和尖端挠度对非压电层厚度的依赖性。上述方法和结论可用于MCPA的结构优化设计和性能改进。

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