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首页> 外文期刊>Journal of optoelectronics and advanced materials >MEMS structures characterization on PMMA layer using KrF excimer laser micromachining
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MEMS structures characterization on PMMA layer using KrF excimer laser micromachining

机译：使用KrF准分子激光微加工在PMMA层上表征MEMS结构

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Gait analysis measurement is a method to access and identify gait events and the measurements of motion parameters involving the lower part of body. This significant method is widely used in rehabilitation, sports as well as health diagnostic towards improving the quality of life. However, it is not routine practice due to costs involved in creating and using gait labs. Alternatively, inertial sensors such as micro cantilever accelerometer can be used in the development of cheap and wearable gait analysis systems. Human stride segmentation measurement based on micro-accelerometer cantilever is used in the study of the lower limb movement patterns that include walk, jump and run; and the measurements of the motion parameters. A complete system consists of a fabricated sensor, a Wheatstone bridge circuit and a signal amplifier tailored for real-time stride analysis measurement is proposed. The novel fabrication method of an accelerometer sensor using laser micromachining is introduced in order to develop a simple way in realizing the sensor formation. This study allows us to optimize the requirements of hard-mask and fabrication process steps by reduction of 30% and 25% respectively. In the general framework, this research activity is focused towards development of Piezoresistive cantilever formation using laser micromachining for fast fabrication development for real life gait and stride segmentation measurement application.
机译：步态分析测量是一种访问和识别步态事件以及涉及身体下部的运动参数的测量方法。此重要方法广泛用于康复，运动以及健康诊断中，以改善生活质量。但是，由于创建和使用步态实验室会涉及成本，因此这不是常规做法。可替代地，诸如微型悬臂加速度计的惯性传感器可以用于便宜且可穿戴的步态分析系统的开发中。基于微加速度计悬臂的步幅分割测量被用于研究下肢运动模式，包括步行，跳跃和奔跑;以及运动参数的测量。提出了一个完整的系统，该系统由装配好的传感器，惠斯通电桥电路和为实时步幅分析测量量身定制的信号放大器组成。为了开发一种实现传感器结构的简单方法，介绍了一种采用激光微加工的加速度传感器的新颖制造方法。这项研究使我们可以通过分别减少30％和25％来优化硬掩模和制造工艺步骤的要求。在总体框架内，这项研究活动的重点是利用激光微加工开发压阻悬臂梁，以快速开发用于现实步态和步幅分割测量应用的制造。

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