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首页> 外文期刊>Journal of Nuclear Materials: Materials Aspects of Fission and Fusion >OXIDATION AND HYDROGEN ISOTOPE EXCHANGE IN AMORPHOUS, DEUTERATED CARBON FILMS
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OXIDATION AND HYDROGEN ISOTOPE EXCHANGE IN AMORPHOUS, DEUTERATED CARBON FILMS

机译：非晶，脱碳的碳膜中的氧化和氢同位素交换

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The hydrogen desorption and air oxidation of amorphous deuterated carbon (a-C:D) films deposited on Si are investigated. The results are compared with a hydrogenated carbon layer deposited on a silicon collector sample mounted on the wall of tokamak ASDEX Upgrade during 6 months' plasma operation. The a-C:D films, deposited on a silicon substrate by the RF glow-discharge method, are exposed to air at room temperature and between 500 and 800 K. The total amounts and depth profiles of both deuterium and carbon are measured by ERD (elastic recoil detection) and PES (proton enhanced scattering). It is found that the surface deuterium loss is accompanied by oxygen uptake and hydrogen isotope exchange in the film until deuterium is completely released. Further annealing leads to the removal of the whole carbon layer. In accordance with previous oxygen implantation studies the erosion is modeled to be due to the chemical reaction of carbon and deuterium with oxygen from air. The removal of the codeposited layer from the ASDEX-Upgrade sample proceeds much faster than that found for a-C:D films under identical treatment conditions. The removal rate strongly depends on film structure. [References: 19]
机译：研究了沉积在Si上的非晶氘代碳（a-C：D）膜的氢解吸和空气氧化。在六个月的等离子操作过程中，将结果与沉积在托卡马克ASDEX Upgrade壁上硅收集器样品上沉积的氢化碳层进行了比较。通过射频辉光放电法沉积在硅基板上的aC：D膜在室温和500至800 K之间暴露于空气中。氘和碳的总量和深度分布通过ERD（弹性反冲检测）和PES（质子增强散射）。发现表面氘的损失伴随着膜中氧的吸收和氢同位素的交换，直到氘被完全释放。进一步的退火导致整个碳层的去除。根据先前的氧注入研究，对侵蚀的建模是由于碳和氘与空气中的氧发生化学反应。在相同的处理条件下，从ASDEX-Upgrade样品中去除共沉积层的过程比在a-C：D膜中发现的过程要快得多。去除率在很大程度上取决于膜的结构。 [参考：19]

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