...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Self-patterned aluminium interconnects and ring electrodes for arrays of microcavity plasma devices encapsulated in Al2O3
【24h】

Self-patterned aluminium interconnects and ring electrodes for arrays of microcavity plasma devices encapsulated in Al2O3

机译：自图案化铝互连和环形电极，用于封装在Al2O3中的微腔等离子体设备阵列

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Automatic formation of Al interconnects and ring electrodes, fully encapsulated by alumina, in planar arrays of Al2O3/Al/Al2O3 microcavity plasma devices has been accomplished by electrochemical processing of Al foil. Following the fabrication of cylindrical microcavities (50-350 mu m in diameter) in 127 mu m thick Al foil, virtually complete anodization of the foil yields azimuthally symmetric Al electrodes surrounding each cavity and interconnects between adjacent microcavities that are produced and simultaneously buried within a transparent Al2O3 film without the need for conventional patterning techniques. The diameter and pitch of the microcavities prior to anodization, as well as the anodization process parameters, determine which of the microcavity plasma devices in a one- or two-dimensional array are connected electrically. Data presented for 200 mu m diameter cavities with a pitch of 150-225 mu m illustrate the patterning of the interconnects and electrode connectivity after 4-10 h of anodization in oxalic acid. Self-patterned, linear arrays comprising 25 dielectric barrier devices have been excited by a sinusoidal or bipolar pulse voltage waveform and operated in 400-700 Torr of rare gas. Owing to the electrochemical conversion of most of the Al foil into Al2O3, the self-formed arrays exhibit an areal capacitance similar to 82% lower than that characteristic of previous Al/Al2O3 device arrays (Park et al 2006 J. Appl. Phys. 99 026107).
机译：通过铝箔的电化学处理，在Al2O3 / Al / Al2O3微腔等离子体装置的平面阵列中自动形成了被氧化铝完全封装的Al互连和环形电极。在127微米厚的铝箔中制造圆柱形微腔（直径为50-350微米）之后，箔的几乎完全阳极氧化会产生围绕每个腔的方位角对称的铝电极，并在相邻微腔之间产生互连并将其同时掩埋在透明的Al2O3薄膜，而无需传统的图案化技术。阳极氧化之前微腔的直径和间距以及阳极氧化工艺参数确定一维或二维阵列中的哪些微腔等离子体装置被电连接。所提供的有关200微米直径腔（节距为150-225微米）的数据说明了在草酸中阳极氧化4-10小时后互连的图案和电极连接性。由正弦或双极脉冲电压波形激发的包括25个介电势垒器件的自构图线性阵列已在400-700托稀有气体中工作。由于大多数的铝箔被电化学转化为Al2O3，自形成的阵列的面电容比以前的Al / Al2O3器件阵列的特性低约82％（Park等，2006 J. Appl。Phys。99）。 026107）。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号