首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Increase in probability of ion capture into the planar channelling regime by a buried oxide layer
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Increase in probability of ion capture into the planar channelling regime by a buried oxide layer

机译:掩埋氧化物层增加了离子捕获到平面沟道区的可能性

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We suggest the use of a buried oxide layer to increase the efficiency of particle capture into the regime of stable channelling motion. At normal incidence, available separation by implanted oxygen structures can be used to increase the probability of proton capture with energies from 5 MeV to about 1 GeV. The fraction of nonchannelled protons can be decreased down to 2% at energies of several hundred MeV in the case of (1 1 0) Si planes. Rutherford backscattering as well as transmitted energy or angular distribution techniques can be used to observe the increase in channelling efficiency.
机译:我们建议使用掩埋的氧化物层来增加颗粒捕获进入稳定通道运动状态的效率。在法向入射时,可以使用通过注入的氧结构进行的有效分离来增加能量从5 MeV到约1 GeV的质子捕获可能性。在(1 1 0)Si平面的情况下,在数百MeV的能量下,非沟道质子的比例可以降低至2%。卢瑟福反向散射以及透射能量或角度分布技术可用于观察通道效率的提高。

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