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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Depth profiling of inhomogeneous zirconia films by optical and Rutherford backscattering spectrometric techniques
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Depth profiling of inhomogeneous zirconia films by optical and Rutherford backscattering spectrometric techniques

机译：光学和卢瑟福背散射光谱技术对非均相氧化锆膜的深度分析

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摘要

A method of determining an average refractive-index of a transparent inhomogeneous film on a transparent substrate is proposed. It requires making measurements at normal incidence of the transmittance from the sample using a readily available spectrophotometer. The usefulness of the technique is demonstrated by successful application to thermally evaporated zirconia (ZrO2) samples, a type known to present troublesome examples of optical inhomogeneity. Depth profiles of the zirconia films obtained by optical and Rutherford backscattering spectrometric techniques support an earlier model of an inhomogeneous film with a columnar structure. In that reported model it is suggested that the film retains the hexagonal array of closely packed circular bases of the columns and that the columnar diameters decrease with the distance from the substrate side of the film.
机译：提出了一种确定透明基板上的透明非均质膜的平均折射率的方法。它要求使用现成的分光光度计在样品透射率的法线入射下进行测量。成功应用于热蒸发氧化锆（ZrO2）样品已证明了该技术的实用性，该样品已知会带来麻烦的光学不均匀性示例。通过光学和卢瑟福反向散射光谱技术获得的氧化锆膜的深度剖面支持具有柱状结构的不均匀膜的较早模型。在该报道的模型中，建议该膜保留紧密堆积的圆柱的圆形底部的六边形阵列，并且柱状直径随距该膜的基材侧的距离而减小。

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